Separation of Gas Mixtures in Free Molecular Flow through a Vibrating Membrane / V. L. Kovalev, V. V. Kos'yanchuk, and  A. N. Yakunchikov. // Vestnik Moskovskogo Universiteta. Seriya 1. Matematika. Mekhanika. 2015. № 5. P. 64-67 [Moscow Univ. Mech. Bulletin. Vol. 72, N 2, 2017. P. 126-129].

A free molecular gas flow through a membrane vibrating in its plane is studied. Optimal vibration parameters are determined for the most efficient separation of gases with different molecular masses.

Key words: membrane, separation of gases, high-frequency vibrations, microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS), free molecular flow.